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Openai/69174844-9774-8012-8b69-32262ca5e35a
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=== 取典型参数(近似): === * εs(Si)≈11.7ε0\varepsilon_s(\text{Si})\approx 11.7\varepsilon_0εs(Si)≈11.7ε0,ε0=8.854×10−12\varepsilon_0=8.854\times10^{-12}ε0=8.854×10−12 F/m。 * 取内建势 Vbi≈0.7V_{bi}\approx 0.7Vbi≈0.7 eV(说明性,实际依材料和金属不同)。 * 使用耗尽宽度公式,掺杂用 cm⁻³ 单位输入(计算中转换为 m⁻³)。 计算结果(耗尽宽度 WWW): * ND=1016 cm−3N_D=10^{16}\ \text{cm}^{-3}ND=1016 cm−3 → W≈300W\approx 300W≈300 nm * ND=1017 cm−3N_D=10^{17}\ \text{cm}^{-3}ND=1017 cm−3 → W≈95W\approx 95W≈95 nm * ND=1018 cm−3N_D=10^{18}\ \text{cm}^{-3}ND=1018 cm−3 → W≈30W\approx 30W≈30 nm * ND=1019 cm−3N_D=10^{19}\ \text{cm}^{-3}ND=1019 cm−3 → W≈9.5W\approx 9.5W≈9.5 nm * ND=1020 cm−3N_D=10^{20}\ \text{cm}^{-3}ND=1020 cm−3 → W≈3.0W\approx 3.0W≈3.0 nm * ND=1021 cm−3N_D=10^{21}\ \text{cm}^{-3}ND=1021 cm−3 → W≈0.95W\approx 0.95W≈0.95 nm 物理解读: * 当 NDN_DND 位于 101610^{16}1016–1018 cm−310^{18}\,\text{cm}^{-3}1018cm−3 区间,W 数十到几百 nm,热激发(TE)明显主导 → 典型肖特基整流行为。 * 要把 W 压到几纳米(使隧穿显著),按上表需要 NDN_DND 接近 1020 cm−310^{20}\,\text{cm}^{-3}1020cm−3 的级别——这非常高(已接近固溶度/金属化或形成金属化合物的浓度)。 * 因此在真实器件中,仅靠均匀掺杂把 W 压到 1–3 nm 是比较困难的,常用的工程手段包括形成高掺杂薄层 (n⁺)、界面化学反应(形成金属硅化物)、界面态导致 Fermi-level 钉扎、或在界面形成强局域场等,来实现有效的“窄势垒/高隧穿率”。
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